Lingkuan Meng - Concepedia

Author

Lingkuan Meng

Chinese Academy of Sciences ORCID

Also Known As

Hushan Cui, L. Meng, Leong Tse Meng, Ling-Kuan Meng, Lingkuan Meng, Yihong Lu

Publications

310

Citations

H-Index

Concepts

All Affiliations

Chinese Academy of Sciences Institute of Microelectronics University of Chinese Academy of Sciences

About

Lingkuan Meng is an author at Chinese Academy of Sciences specializing in engineering, microelectronics, and applied physics.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	7	7	180
2	Applied Physics	5	5	153
3	Electrical Engineering	5	5	147
4	Materials Science	2	2	93
5	Mechanical Engineering	2	2	47

Lingkuan Meng

Publications

217

Citations

H-Index

Page 1

	Year	Citations
Novel GAA Si Nanowire p-MOSFETs With Excellent Short-Channel Effect Immunity via an Advanced Forming Process Qingzhu Zhang, Huaxiang Yin, Lingkuan Meng, IEEE Electron Device Letters EngineeringNw ChannelsSemiconductor DeviceSemiconductor NanostructuresSemiconductors	2018	50
FOI FinFET with ultra-low parasitic resistance enabled by fully metallic source and drain formation on isolated bulk-fin Qingzhu Zhang, Huaxiang Yin, Jun Luo, EngineeringSilicon On InsulatorInterconnect (Integrated Circuits)Semiconductor DeviceNanoelectronics	2016	43
Effect of process parameters on sidewall damage in deep silicon etch Lingkuan Meng, Yan Jiang Journal of Micromechanics and Microengineering Electrical EngineeringSf6 Flow RateEngineeringProcess ParametersBias Power	2015	29
Novel 14-nm Scallop-Shaped FinFETs (S-FinFETs) on Bulk-Si Substrate Weijia Xu, Huaxiang Yin, Xiaolong Ma, Nanoscale Research Letters	2015	23
Influence of the hard masks profiles on formation of nanometer Si scalloped fins arrays Qingzhu Zhang, Hailing Tu, Huaxiang Yin, Microelectronic Engineering EngineeringMicrofabricationNanotechnologyNanometer SiMechanical Engineering	2018	18
Mechanism study of sidewall damage in deep silicon etch Lingkuan Meng, Yan Jiang Applied Physics A EngineeringSurface ScienceSidewall DamageElectronic PackagingSilicon On Insulator	2014	15
A Novel Nanofabrication Technique of Silicon-Based Nanostructures Lingkuan Meng, Xiaobin He, Jianfeng Gao, Nanoscale Research Letters	2016	14
Planar Bulk MOSFETs With Self-Aligned Pocket Well to Improve Short-Channel Effects and Enhance Device Performance Yanbo Zhang, Huilong Zhu, Hao Wu, IEEE Transactions on Electron Devices SemiconductorsSemiconductor TechnologyElectrical EngineeringSelf-aligned Pocket WellEngineering	2015	13
Innovatively composite hard mask to feature sub-30nm gate patterning Lingkuan Meng, Chunlong Li, Xiaobin He, Microelectronic Engineering Electrical EngineeringComposite Hard MaskVlsi DesignCircuit DesignMicrofabrication	2014	12

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