Lingkuan Meng

Novel GAA Si Nanowire p-MOSFETs With Excellent Short-Channel Effect Immunity via an Advanced Forming Process

Qingzhu Zhang, Huaxiang Yin, Lingkuan Meng et al. · IEEE Electron Device Letters · 2018 · 50 citations

Engineering, Nw Channels, Semiconductor Device +16

FOI FinFET with ultra-low parasitic resistance enabled by fully metallic source and drain formation on isolated bulk-fin

Qingzhu Zhang, Huaxiang Yin, Jun Luo et al. · 2016 · 43 citations

Engineering, Silicon On Insulator, Interconnect (Integrated Circuits) +16

Effect of process parameters on sidewall damage in deep silicon etch

Lingkuan Meng, Yan Jiang · Journal of Micromechanics and Microengineering · 2015 · 29 citations

Electrical Engineering, Sf6 Flow Rate, Engineering +13

Novel 14-nm Scallop-Shaped FinFETs (S-FinFETs) on Bulk-Si Substrate

Weijia Xu, Huaxiang Yin, Xiaolong Ma et al. · Nanoscale Research Letters · 2015 · 23 citations · Full text

Influence of the hard masks profiles on formation of nanometer Si scalloped fins arrays

Qingzhu Zhang, Hailing Tu, Huaxiang Yin et al. · Microelectronic Engineering · 2018 · 18 citations

Engineering, Microfabrication, Nanotechnology +10