Concepedia

Publication | Closed Access

Influence of the hard masks profiles on formation of nanometer Si scalloped fins arrays

DOI

18

Citations

27

References

2018

Year

Qingzhu Zhang, Hailing Tu, Huaxiang Yin, Feng Wei, Junjie Li, Lingkuan Meng, Zhaohao Zhang, Yan Jiang, Hongbin Zhao, Tongda Ma,
Microelectronic Engineering

References

YearCitations

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