Statistics
Publications
3
Citations
40
H-Index
3
Active since
2007
Affiliations
Shuji Hirao is an author at Panasonic (Japan) specializing in materials science, barrier materials, and electroplating.
Publications per year
2007–2016
3
3
Extremely Low Keff (1.9) Cu Interconnects with Air Gap Formed Using SiOC
Takeshi Harada, Akira Ueki, Kazuo Tomita et al. · 2007 · 15 citations
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