Concepedia

Author

Akira Ueki

Panasonic (Japan)

Also Known As

A. Ueki, Akira UEKI, Akira Ueki

10

Publications

30

Citations

3

H-Index

10

Concepts

All Affiliations

Panasonic (Japan)
AU

About

Akira Ueki is an author at Panasonic (Japan) specializing in materials science, engineering, and microelectronics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

1

1

15

2

Applied Physics

1

1

15

3

Electrical Engineering

1

1

15

4

Materials Engineering

1

1

15

5

Materials Science

1

1

15

Akira Ueki

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1

Publications

15

Citations

1

H-Index

YearCitations

Extremely Low Keff (1.9) Cu Interconnects with Air Gap Formed Using SiOC

Takeshi Harada, Akira Ueki, Kazuo Tomita,

2007

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