Akira Ueki is an author at Panasonic (Japan) specializing in materials science, engineering, and microelectronics.
Top concepts
EngineeringApplied PhysicsNanoelectronicsSurface ScienceMaterial ScienceMicroelectronicsElectronic PackagingElectrical InsulationMaterials EngineeringElectrical Engineering
Publications per year
2007–2007
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Extremely Low Keff (1.9) Cu Interconnects with Air Gap Formed Using SiOC
Takeshi Harada, Akira Ueki, Kazuo Tomita et al. · 2007 · 15 citations
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