Shoubhanik Nath is an author at Samsung (South Korea) specializing in digital twin, nanolithography, and microfabrication.
Top concepts
3D PrintingEngineeringDigital TwinApplied PhysicsNanoelectronicsNanolithographyMaterial ScienceMicroelectronicsMicrofabricationElectrical Engineering
Publications per year
2020–2024
2
2
Future of plasma etching for microelectronics: Challenges and opportunities
G. S. Oehrlein, Stephan M. Brandstadter, Robert L. Bruce et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2024 · 103 citations · Full text
Materials Science, Electrical Engineering, Digital Twins +14
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