Yuji Kasashima

Statistics

Publications

Citations

196

H-Index

Active since

2007

Affiliations

National Institute of Advanced Industrial Science and Technology(Current)

Tohoku University

Advantest (Japan)

Yuji Kasashima is an author at National Institute of Advanced Industrial Science and Technology specializing in physics, plasma physics, and plasma etching.

ORCID

Publications per year

2007–2019

Publications

Instantaneous Generation of Many Flaked Particles by Impulsive Force of Electric Field Stress Acting on Inner Wall of Mass-Production Plasma Etching Equipment

Yuji Kasashima, Natsuko Nabeoka, Fumihiko Uesugi · Japanese Journal of Applied Physics · 2013 · 33 citations

Natural Sciences, Electrical Engineering, Physics +15

Many flaked particles caused by impulsive force of electric field stress and effect of electrostriction stress in mass-production plasma etching equipment

Yuji Kasashima, Natsuko Nabeoka, Taisei Motomura et al. · Japanese Journal of Applied Physics · 2014 · 25 citations

Natural Sciences, Electrical Engineering, Physics +14

Investigation of the relationship between plasma etching characteristics and microstructures of alumina ceramics for chamber parts

Yuji Kasashima, Tatsuo Tabaru, Osamu Matsuda et al. · Japanese Journal of Applied Physics · 2019 · 24 citations

Natural Sciences, Materials Engineering, Materials Science +17

Transport of a helicon plasma by a convergent magnetic field for high speed and compact plasma etching

Kazunori Takahashi, Taisei Motomura, Akira Ando et al. · Journal of Physics D Applied Physics · 2014 · 21 citations

Natural Sciences, Physics, Microfabrication +13

Generation of supersonic plasma flows using an applied-field MPD arcjet and ICRF heating

M. Inutake, Akira Ando, Katsumi Hattori et al. · Plasma Physics and Controlled Fusion · 2007 · 18 citations

Natural Sciences, Aerospace Engineering, Physics +16

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