Concepedia

Fumihiko Uesugi

FU

32

Publications

1K

Citations

18

H-Index

1985

Active since

Affiliations

National Institute for Materials Science(Current)

National Institute of Advanced Industrial Science and Technology

University of Tsukuba

Toshiba (Japan)

Fumihiko Uesugi is an author at National Institute for Materials Science specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicroelectronicsElectrical EngineeringPhysicsInstrumentationMicrofabricationSurface ScienceNanomaterials

Publications per year

1985–2024

32

Publications

32

Mass Spectrometric Study of Ga ( CH 3 ) 3 and Ga ( C 2 H 5 ) 3 Decomposition Reaction in H 2 and N 2

Masaji Yoshida, Hiroyuki Watanabe, Fumihiko Uesugi · Journal of The Electrochemical Society · 1985 · 210 citations

Inorganic Chemistry, Chemical Engineering, Industrial Chemistry +15

Reduction of Particle Contamination in Plasma-Etching Equipment by Dehydration of Chamber Wall

Natsuko Ito, Tsuyoshi Moriya, Fumihiko Uesugi et al. · Japanese Journal of Applied Physics · 2008 · 96 citations

Engineering, Plasma Discharge Suppresses, Vacuum Device +20

Semiconductor nanochannels in metallic carbon nanotubes by thermomechanical chirality alteration

Dai‐Ming Tang, Sergey V. Erohin, Dmitry G. Kvashnin et al. · Science · 2021 · 59 citations

Engineering, Nanocomputing, Electronic Properties +17

Evaluation of two-dimensional strain distribution by STEM/NBD

Fumihiko Uesugi, A. Hokazono, Shiro Takeno · Ultramicroscopy · 2011 · 55 citations

Engineering, Strain Localization, Mechanical Engineering +6

Photothermal effect contribution on film quality improvement in excimer-laser induced metal CVD

H. Yokoyama, Fumihiko Uesugi, S. Kishida et al. · Applied Physics A · 1985 · 48 citations

Materials Science, Advanced Laser Processing, Engineering +9

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