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Mass Spectrometric Study of Ga ( CH 3 ) 3 and Ga ( C 2 H 5 ) 3 Decomposition Reaction in H 2 and N 2
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1985
Year
Inorganic ChemistryChemical EngineeringIndustrial ChemistryDecomposition ReactionEngineeringMass SpectrometryTmg ConcentrationAnalytical ChemistryN 2Reaction IntermediateChemistryHydrogenReaction ProcessMass Spectrometric StudyChemical KineticsHomogeneous First‐order KineticsQuadrupole Mass AnalyzerInorganic Compound
Decomposition of trimethylgallium (TMG) and triethylgallium (TEG) in hydrogen and nitrogen atmospheres was studied by a quadrupole mass analyzer. The decomposition reactions of TMG in and in and of TEG in and in take place in the temperature ranges 370°–460°, 450°–570°, 220°–330°, and 270°–380°C, respectively. The reaction mechanisms are hydrogenolysis for TMG in , homolytic fission for TMG in , and β elimination for TEG in both and . The hydrogenolysis of TMG follows homogeneous first‐order kinetics on TMG concentration.