Taisei Motomura

Statistics

Publications

Citations

330

H-Index

Active since

1991

Affiliations

National Institute of Advanced Industrial Science and Technology(Current)

Kumamoto University

Tokai University

Institute for Nuclear Research

Kyushu University

Taisei Motomura is an author at National Institute of Advanced Industrial Science and Technology specializing in plasma physics, physics, and natural sciences.

ORCID

Publications per year

1991–2023

Publications

Development of high-density helicon plasma sources and their applications

Shunjiro Shinohara, Tohru Hada, Taisei Motomura et al. · Physics of Plasmas · 2009 · 88 citations

Natural Sciences, Physics, Electromagnetics +13

Large-area high-density helicon plasma sources

Shunjiro Shinohara, Taisei Motomura, Keiji Tanaka et al. · Plasma Sources Science and Technology · 2010 · 37 citations

Natural Sciences, Physics, Antennas +11

Many flaked particles caused by impulsive force of electric field stress and effect of electrostriction stress in mass-production plasma etching equipment

Yuji Kasashima, Natsuko Nabeoka, Taisei Motomura et al. · Japanese Journal of Applied Physics · 2014 · 25 citations

Natural Sciences, Electrical Engineering, Physics +14

Investigation of the relationship between plasma etching characteristics and microstructures of alumina ceramics for chamber parts

Yuji Kasashima, Tatsuo Tabaru, Osamu Matsuda et al. · Japanese Journal of Applied Physics · 2019 · 24 citations

Natural Sciences, Materials Engineering, Materials Science +17

Transport of a helicon plasma by a convergent magnetic field for high speed and compact plasma etching

Kazunori Takahashi, Taisei Motomura, Akira Ando et al. · Journal of Physics D Applied Physics · 2014 · 21 citations

Natural Sciences, Physics, Microfabrication +13

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