M. Tartz

Ripple rotation, pattern transitions, and long range ordered dots on silicon by ion beam erosion

B. Ziberi, Frank Frost, M. Tartz et al. · Applied Physics Letters · 2008 · 89 citations

Materials Science, Ion Incidence Angle, Ion Implantation +15

Importance of ion beam parameters on self-organized pattern formation on semiconductor surfaces by ion beam erosion

B. Ziberi, Frank Frost, M. Tartz et al. · Thin Solid Films · 2004 · 46 citations

Ion Implantation, Engineering, Physics +9

Characterization of a modular broad beam ion source

Michael Zeuner, H. Neumann, Frank Scholze et al. · Plasma Sources Science and Technology · 1998 · 36 citations · Full text

Engineering, Physics, Mass Spectrometry +7

Sputter yields of Mo, Ti, W, Al, Ag under xenon ion incidence

M. Tartz, T. Heyn, Carsten Bundesmann et al. · The European Physical Journal D · 2011 · 32 citations

Materials Science, Engineering, Sputter Yields +6

Inductive coupled radio frequency plasma bridge neutralizer

Frank Scholze, M. Tartz, H. Neumann · Review of Scientific Instruments · 2008 · 32 citations

Electrical Engineering, Engineering, Radio Frequency +8