Concepedia

Sputter yields of Mo, Ti, W, Al, Ag under xenon ion incidence

M. Tartz, T. Heyn, Carsten Bundesmann, Claus G. Zimmermann, H. Neumann

The European Physical Journal D · 2011 · 32 citations · 15 references

DOI

Concepts

References

15

Charge Exchange between Gaseous Ions and Atoms

Donald Rapp, W. E. Francis · The Journal of Chemical Physics · 1962 · 805 citations

, , +14

Sputtering Yields for Low Energy He+-, Kr+-, and Xe+-Ion Bombardment

Duane Rosenberg, G. K. Wehner · Journal of Applied Physics · 1962 · 431 citations

, , +5

Sputtering Yields at Very Low Bombarding Ion Energies

R. V. Stuart, G. K. Wehner · Journal of Applied Physics · 1962 · 306 citations

, , +12

Revised formulae for sputtering data

C. Garcı́a-Rosales, W. Eckstein, J. Roth · Journal of Nuclear Materials · 1995 · 179 citations

, , +2

Sputtering yield measurements during low energy xenon plasma bombardment

R. P. Doerner, D.G. Whyte, D. M. Goebel · Journal of Applied Physics · 2003 · 172 citations · Full text

, , +13