Publication | Closed Access
Sputter yields of Mo, Ti, W, Al, Ag under xenon ion incidence
32
Citations
15
References
2011
Year
Materials ScienceEngineeringSputter YieldsSurface ScienceApplied PhysicsVacuum DeviceChemical DepositionIon EmissionXenon Ion Incidence
| Year | Citations | |
|---|---|---|
Page 1
Page 1