Ion-assisted growth of Ti1−xAlxN/Ti1−yNbyN multilayers by combined cathodic-arc/magnetron-sputter deposition

I. Petrov, P. Losbichler, D. Bergstrom, +4

Thin Solid Films

Materials EngineeringMaterials ScienceIon-assisted GrowthEngineeringSurface Science +5

Chromium nitride coatings grown by unbalanced magnetron (UBM) and combined arc/unbalanced magnetron (ABS™) deposition techniques

T. Hurkmans, D.B. Lewis, John S. Brooks, +1

Surface and Coatings Technology

Materials ScienceMaterials EngineeringEngineeringSurface ScienceApplied Physics +7

Influence of ion bombardment on structure and properties of unbalanced magnetron grown CrNx coatings

T. Hurkmans, D.B. Lewis, H. Paritong, +2

Surface and Coatings Technology

Materials ScienceMagnetismEngineeringCorrosionIon Bombardment +4

Properties and characterization of multilayers of carbides and diamond-like carbon

C. Strondl, G.J. van der Kolk, T. Hurkmans, +4

Surface and Coatings Technology

Materials EngineeringMaterials ScienceDiamond-like CarbonEngineeringCarbon-based Material +4

Large-scale fabrication of hard superlattice thin films by combined steered arc evaporation and unbalanced magnetron sputtering

L.A. Donohue, W.‐D. Münz, D.B. Lewis, +5

Surface and Coatings Technology

Materials EngineeringMaterials ScienceMagnetismLarge-scale FabricationEngineering +11

Comparison of TiAlN coatings grown by unbalanced magnetron and arc bond sputtering techniques

W.‐D. Münz, T. Hurkmans, G. Keiren, +1

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

EngineeringMechanical EngineeringTi-ion PretreatmentSurface TechnologyCorrosion +19

Defects in TiN and TiAIN coatings grown by combined cathodic arc/unbalanced magnetron technology

W.‐D. Münz, D.B. Lewis, Stuart Creasey, +3

Vacuum

Materials ScienceMaterials EngineeringMagnetron TechnologyCorrosion ProtectionEngineering +8

Improving tribological properties of sputtered boron carbide coatings by process modifications

Tobias Eckardt, K. Bewilogua, G. van der Kolk, +3

Surface and Coatings Technology

Materials ScienceMaterials EngineeringTribological CoatingThermal Spray CoatingEngineering +10

Multilayered titanium tungsten nitride coatings with a superlattice structure grown by unbalanced magnetron sputtering

T. Hurkmans, Thanh Thuy Trinh, D.B. Lewis, +2

Surface and Coatings Technology

Materials EngineeringMaterials ScienceEngineeringThermal Barrier CoatingSurface Science +4

Formation of high temperature phases in sputter deposited Ti-based films below 100 °C

J. Musil, A. J. Bell, J. Vlček, +1

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

EngineeringThin Film Process TechnologyChemical DepositionPure Ti FilmPure Ti +14