Publication | Closed Access

Large-scale fabrication of hard superlattice thin films by combined steered arc evaporation and unbalanced magnetron sputtering

Materials EngineeringMaterials ScienceMagnetismLarge-scale FabricationEngineeringMagnetic Data StoragePhysicsMicrofabricationApplied PhysicsMagnetic Thin FilmsThin FilmsMagnetic DeviceMicroelectronicsUnbalanced Magnetron SputteringThin Film ProcessingMagnetic Medium