Ion-assisted growth of Ti1−xAlxN/Ti1−yNbyN multilayers by combined cathodic-arc/magnetron-sputter deposition - Concepedia

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Ion-assisted growth of Ti1−xAlxN/Ti1−yNbyN multilayers by combined cathodic-arc/magnetron-sputter deposition

119

Citations

35

References

1997

Year

I. Petrov, P. Losbichler, D. Bergstrom, J. E. Greene, W.‐D. Münz, T. Hurkmans, Thanh Thuy Trinh

Thin Solid Films

Materials EngineeringMaterials ScienceIon-assisted GrowthEngineeringSurface ScienceApplied PhysicsThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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