Journal of Materials Science Letters · 1997 · 58 citations · 6 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsChemical Vapor DepositionDopingMetal OxidesSemiconductor Thin FilmsThin-film DepositionThin-film MaterialsAtmospheric PressureAtmospheric Pressure Chemical Vapor DepositionChemical Vapor Deposition MaterialsTin-doped Indium OxideZinc Oxides
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