Phenomenological Model of the Piezoresistive Effect in Polysilicon Films

The Elastic Behaviour of a Crystalline Aggregate

R. Hill · Proceedings of the Physical Society Section A · 1952 · 11.2K citations

Natural Sciences, Materials Engineering, Materials Science +17

Modeling and optimization of monolithic polycrystalline silicon resistors

Nicky Lu, L. Gerzberg, Chih‐Yuan Lu et al. · IEEE Transactions on Electron Devices · 1981 · 311 citations

Engineering, Electrical Engineering, Materials Science +17

Measurement of mechanical properties for MEMS materials

Taechung Yi, Chang‐Jin Kim · Measurement Science and Technology · 1999 · 200 citations

Natural Sciences, Materials Science, Mechanical Engineering +15

Piezoresistance in polysilicon and its applications to strain gauges

P.J. French, A G R Evans · Solid-State Electronics · 1989 · 185 citations

Engineering, Materials Engineering, Materials Science +7

Piezoresistive pressure sensors based on polycrystalline silicon

V. Mosser, J. Suski, Jonathan P. Goss · Sensors and Actuators A Physical · 1991 · 155 citations

Engineering, Materials Engineering, Materials Science +14