Infoscience (Ecole Polytechnique Fédérale de Lausanne) · 1999 · 12 citations · 0 references
EngineeringComputer EngineeringElectrical EngineeringInstrumentationMicroelectromechanical SystemsMicroelectronicsCmos Circuit DesignIntegrated Circuit DesignMems CharacterizationMems DesignScanning Probe MicroscopyScanning TechniquesCmos Analog Circuit DesignCmos Image SensorsDesign For ScanabilityIntegrated Scanner Architecture