Crossing the Dimensional Divide with Optoelectronic Tweezers: Multicomponent Light‐Driven Micromachines with Motion Transfer in Three Dimensions

Abstract

Micromachines capable of performing diverse mechanical tasks in complex and constrained microenvironments are of great interest. Despite important milestones in this pursuit, until now, micromachines are confined to actuation within a single 2D plane due to the challenges of transferring motion across different planes in limited space. Here, a breakthrough method is presented to overcome this limitation: multi-component micromachines that facilitate 3D motion transfer across different planes. These light-driven 3D micromachines, fabricated using standard photolithography combined with direct laser writing, are assembled and actuated via programmable light patterns within an optoelectronic tweezers system. Utilizing charge-induced repulsion and dielectrophoretic levitation effects, the micromachines enable highly efficient mechanical rotation and effective inter-component motion transfer. Through this work, fascinating patterns of similarities are unveiled for the new microscale 3D systems when compared with the macro-scale world in which they live, paving the way for the development of micromechanical devices and microsystems with ever increasing functionality and versatility.