A novel liquid film shearing polishing technique for silicon carbide and its processing damage mechanisms

Bismuthene on a SiC substrate: A candidate for a high-temperature quantum spin Hall material

Science · 2017 · 998 citations · Full text

Chemomechanical Polishing of Silicon Carbide

Ling Zhou, V. Audurier, Pirouz Pirouz et al. · Journal of The Electrochemical Society · 1997 · 208 citations

Engineering, Mechanical Engineering, Silicon Carbide +20

Plasma assisted polishing of single crystal SiC for obtaining atomically flat strain-free surface

Kazuya Yamamura, Tatsuya Takiguchi, Masaki Ueda et al. · CIRP Annals · 2011 · 204 citations

Materials Science, Single Crystal Sic, Engineering +9

Coherent Control of Nitrogen-Vacancy Center Spins in Silicon Carbide at Room Temperature

Junfeng Wang, Fei‐Fei Yan, Qiang Li et al. · Physical Review Letters · 2020 · 162 citations · Full text

Electro-chemical mechanical polishing of single-crystal SiC using CeO2 slurry

Hui Deng, Kenji Hosoya, Yusuke Imanishi et al. · Electrochemistry Communications · 2015 · 144 citations · Full text

Materials Science, Engineering, Corrosion +3