Modulation of ultrafast laser-induced modified structure inside silicon carbide for thin wafer dicing

Femtosecond laser micromachining in transparent materials

Rafael R. Gattass, Eric Mazur · Nature Photonics · 2008 · 3.2K citations

Engineering, Materials Engineering, Materials Science +14

Self-focusing: Theory

John H. Marburger · Progress in Quantum Electronics · 1975 · 1K citations

Femtosecond laser three-dimensional micro- and nanofabrication

Koji Sugioka, Ya Cheng · Applied Physics Reviews · 2014 · 482 citations · Full text

Engineering, Biomedical Engineering, Materials Science +17

In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon

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Engineering, Materials Engineering, Materials Science +16

4H-SiC wafer slicing by using femtosecond laser double-pulses

Eunho Kim, Yasuhiko Shimotsuma, Masaaki Sakakura et al. · Optical Materials Express · 2017 · 103 citations · Full text

Engineering, Materials Engineering, Materials Science +17