Journal of Manufacturing Processes · 2024 · 17 citations · 27 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationSurface EngineeringSurface ScienceEtching ProcessesMachiningMicrofabrication MaterialsSurface MicromachiningSurface ModificationSurface RoughnessEtchingIsotropic EtchingMicro-polishingNano-scale Surface FinishingPolishing ProcessesPolishing-induced RoughnessRoughnessSurface Roughness Engineering
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