High-precision and high-speed etching of diamond surfaces using Fe–Ni alloy catalyzed H–O plasma etching

Dongyue Wen, Yicun Li, Jiwen Zhao, Xiaobin Hao, Sen Zhang, Benjian Liu, Yumin Zhang, V. G. Ralchenko, Bing Dai, Jiaqi Zhu

Carbon · 2023 · 10 citations · 22 references

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