Journal of Manufacturing Processes · 2023 · 37 citations · 33 references
EngineeringManufacturing EngineeringMechanical EngineeringMicroelectromechanical SystemsMicrofabricationUltrasoundMachiningMicrofabrication MaterialsMicrofabrication ProcessesMicromachiningUltrasonicsMachining DynamicsMicro-scale DrillingMicro-toolingMicroelectromechanical System FabricationTorsional Vibration AnalysisUltrasonic MachiningVibration Mitigation
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