Design and analysis of a novel low RF MEMS switch with low pull-in voltage and high capacitance ratio

Engineering mechanics: Statics

Journal of the Franklin Institute · 1960 · 225 citations

Capacitive RF MEMS Switches Fabricated in Standard 0.35-$\mu{\hbox{m}}$ CMOS Technology

Siamak Fouladi, Raafat R. Mansour · IEEE Transactions on Microwave Theory and Techniques · 2010 · 73 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +16

A novel RF MEMS switch on frequency reconfigurable antenna application

Yongqing Xu, Ying Tian, Binzhen Zhang et al. · Microsystem Technologies · 2018 · 59 citations

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RF MEMS Shunt Capacitive Switches Using AlN Compared to $\hbox{Si}_{3}\hbox{N}_{4}$ Dielectric

Montserrat Fernández-Bolaños Badía, Elizabeth Buitrago, Adrian Ionescu · Journal of Microelectromechanical Systems · 2012 · 53 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

Design and development of miniaturized low voltage triangular RF MEMS switch for phased array application

Usha Kiran Kommuri · Applied Surface Science · 2018 · 49 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +11