Wafer-scale high-κ dielectrics for two-dimensional circuits via van der Waals integration - Concepedia

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Wafer-scale high-κ dielectrics for two-dimensional circuits via van der Waals integration

DOI Full Paper Access

114

Citations

34

References

2023

Year

Zheyi Lu, Yang Chen, Weiqi Dang, Lingan Kong, Quanyang Tao, Likuan Ma, Donglin Lu, Liting Liu, Wanying Li, Zhiwei Li,

Nature Communications

References

	Year	Citations

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