Low-temperature spatial atomic layer deposited Ga2O3 films for high-performance flexible deep ultraviolet photodetector

Chia‐Hsun Hsu, Run-Feng Zhu, Pin-Chun Kang, Peng Gao, Wan-Yu Wu, Dong‐Sing Wuu, Shui‐Yang Lien, Wen‐Zhang Zhu

Materials Letters · 2023 · 14 citations · 14 references

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