Effect of Carrier Transport Process on Tunneling Electroresistance in Ferroelectric Tunnel Junction

Abstract

We demonstrate the factors that determine the tunneling electroresistance (TER) of the ferroelectric tunnel junction (FTJ) by investigating the effects of temperature ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${T}$ </tex-math></inline-formula> ) and the number of cycles ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${N}{)}$ </tex-math></inline-formula> on remnant polarization ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${P}_{\text {r}}{)}$ </tex-math></inline-formula> and carrier transport process. The fabricated FTJs have a metal/ferroelectric/insulator/semiconductor structure. The <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${P}_{\text {r}}$ </tex-math></inline-formula> is increased with increasing <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${T}$ </tex-math></inline-formula> and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${N}$ </tex-math></inline-formula> due to oxygen vacancy redistribution. However, the increased <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${P}_{\text {r}}$ </tex-math></inline-formula> in a higher <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${T}$ </tex-math></inline-formula> and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${N}$ </tex-math></inline-formula> does not improve the TER ratio. Using current-voltage characterization and low-frequency noise spectroscopy, we reveal that the carrier transport process at the interface between the ferroelectric and dielectric layers becomes more important than <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${P}_{\text {r}}$ </tex-math></inline-formula> in determining the TER ratio.