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Effect of hydroxy carboxylates as complexing agent on improving chemical mechanical polishing performance of M-plane sapphire and action mechanism analysis

Materials ScienceMaterials EngineeringChemical EngineeringEngineeringM-plane SapphireMaterial ProcessingHydroxy CarboxylatesSurface FunctionalizationAction Mechanism AnalysisSurface TreatmentMolecular EngineeringSurface Processing