Publication | Closed Access
MEMS-based resistive hydrogen sensor with high performance using a palladium-gold alloy thin film
42
Citations
57
References
2022
Year
Materials ScienceElectrical EngineeringEngineeringMicrofabricationGas SensorElectrochemical Gas SensorSensor DesignHydrogenHigh PerformanceMicroelectronicsSensor TechnologyMicro-electromechanical System
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