Technology of static oblique lithography used to improve the fidelity of lithography pattern based on DMD projection lithography

Long Huang, Chunxia Liu, Han Zhang, Shaoqing Zhao, Mingyue Tan, Minzhe Liu, Zhongqing Jia, Ruizhan Zhai, Hua Liu

Optics & Laser Technology · 2022 · 27 citations · 23 references

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