Publication | Open Access

Field dependent study on the impact of co-evaporated multihits and ion pile-up for the apparent stoichiometric quantification of GaN and AlN

Aluminium NitrideEngineeringApplied PhysicsAluminum Gallium NitrideIon Pile-upGallium OxideGan Power DeviceCo-evaporated MultihitsGeochemistryChemistryField Dependent StudyChemical Kinetics