Microelectronics Reliability · 2022 · 24 citations · 24 references
EngineeringElectrical EngineeringMaterials ScienceActuatorsMicroelectromechanical SystemsMicroelectronicsMems DesignMems FabricationMems MaterialsMems SwitchesMicroelectromechanical SensorsRf MemsRf Mems Switches
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Sayanu Pamidighantam, Robert Puers, Kris Baert et al. · Journal of Micromechanics and Microengineering · 2002 · 368 citations
Engineering, Electrical Engineering, Mechanical Engineering +17