A low-damage copper removal process by femtosecond laser for integrated circuits

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Effects of electron scattering at metal-nonmetal interfaces on electron-phonon equilibration in gold films

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Natural Sciences, Materials Science, Physics +17

Controlling 2D laser nano structuring over large area with double femtosecond pulses

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Engineering, Materials Engineering, Materials Science +17

Development of low temperature Cu Cu bonding and hybrid bonding for three-dimensional integrated circuits (3D IC)

Hanwen Hu, Kuan‐Neng Chen · Microelectronics Reliability · 2021 · 118 citations

Engineering, Electrical Engineering, Materials Science +16

Periodic microstructures produced by femtosecond laser irradiation on titanium plate

Masahiro Tsukamoto, Keita Asuka, Hitoshi Nakano et al. · Vacuum · 2006 · 114 citations

Engineering, Materials Engineering, Materials Science +15