Microelectronic Engineering · 2004 · 74 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationNanotechnologySurface ScienceBioprintingCoatingsNanoimprint LithographySoft LithographyStamping ProcessesSurface ModificationAdhesive InterfacesAdhesive PropertiesSoft Nanoimprint LithographySubstrate AdhesionThree-dimensional Nanostructuring