Influence of nanometre-sized notch and water on the fracture behaviour of single crystal silicon microelements

Fracture testing of silicon microelements <i>i</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> in a scanning electron microscope

Stefan Johansson, Jan‐Åke Schweitz, L Tenerz et al. · Journal of Applied Physics · 1988 · 225 citations

Engineering, Materials Engineering, Materials Science +17

Slow Crack Growth in Single-Crystal Silicon

J. A. Connally, Stuart B. Brown · Science · 1992 · 185 citations

Engineering, Materials Engineering, Materials Science +17

In situ tensile strength measurement and Weibull analysis of thick film and thin film micromachined polysilicon structures

S. Greek, Fredric Ericson, Stefan Johansson et al. · Thin Solid Films · 1997 · 119 citations

Natural Sciences, Materials Engineering, Materials Science +17

Fracture and fatigue behavior of single crystal silicon microelements and nanoscopic AFM damage evaluation

K. Komai, K. Minoshima, S. Inoue · Microsystem Technologies · 1998 · 82 citations

Natural Sciences, Materials Engineering, Materials Science +16

Micromechanical fatigue testing

J. A. Connally, Stuart B. Brown · Experimental Mechanics · 1993 · 68 citations