Concepedia
Applied Surface Science · 1989 · 23 citations · 8 references
8
Chemical and electronic structure of the SiO2/Si interface
F. J. Grunthaner, P. J. Grunthaner · Materials Science Reports · 1986 · 448 citations
Natural Sciences, Chemistry, Materials Science +14
The Oxidation of Shaped Silicon Surfaces
R. B. Marcus, T. T. Sheng · Journal of The Electrochemical Society · 1982 · 258 citations
Natural Sciences, Materials Engineering, Materials Science +17
Yttrium oxide/silicon dioxide: a new dielectric structure for VLSI/ULSI circuits
L. Manchanda, M. Gurvitch · IEEE Electron Device Letters · 1988 · 108 citations
Engineering, Electrical Engineering, Materials Science +17
Impact of copper contamination on the quality of silicon oxides
H. Wendt, H. Cerva, V. Lehmann et al. · Journal of Applied Physics · 1989 · 95 citations
Engineering, Materials Engineering, Materials Science +17
Hydrogen-related memory traps in thin silicon nitride films
Vikram Kapoor, Robert S. Bailey · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1983 · 76 citations