Journal of Intelligent Material Systems and Structures · 2000 · 37 citations · 0 references
EngineeringManufacturing EngineeringMaterials ScienceAdditive ManufacturingComputer-integrated ManufacturingMicrofabricationIntegrated Circuit FabricationInterconnect DesignInterconnect TechnologyMems FabricationMicrofabrication MaterialsMicrofabrication ProcessesInterconnect FabricationInterconnect Topology Design