Concepedia

Publication | Closed Access

Study of deformation mechanism of structural anisotropy in 4H–SiC film by nanoindentation

DOI

24

Citations

49

References

2022

Year

Lianghao Xue, Gan Feng, Gai Wu, Fang Dong, Kang Liang, Rui Li, Shizhao Wang, Sheng Liu
Materials Science in Semiconductor Processing

References

YearCitations

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