Materials Today Proceedings · 2022 · 19 citations · 40 references
EngineeringMaterials EngineeringMaterials ScienceManufacturing ProcessesMaterials ChemistryMaterials ProcessingEtching ProcessesPolishing OperationsSubstrate PreparationSurface FinishingSurface PreparationSurface TreatmentPolishing ProcessesSemiconductor Wafer PolishingSilicon Wafer PreparationSilicon Wafer ProcessingSilicon WafersSubstrate PolishingWafer Cleaning
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Hans Kurt Tönshoff, W. Von Schmieden, Ichiro INASAKI et al. · CIRP Annals · 1990 · 187 citations
Engineering, Manufacturing Engineering, Materials Engineering +11