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Effects of doping with Zr and Hf on the structure and properties of Mo-Si-B coatings obtained by magnetron sputtering of composite targets

Materials EngineeringMaterials ScienceEngineeringOxide ElectronicsSurface ScienceApplied PhysicsMagnetron SputteringComposite TargetsMo-si-b CoatingsChemical Vapor DepositionThin Film ProcessingProtective Coating