Inorganic Materials · 2003 · 12 citations · 2 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsSemiconductor Crystal GrowthSemiconductor Device MaterialsSilicon MaterialsSiliconSilicon DioxideSilicon Thin Films
2
Thin Films—Interdiffusion and Reactions
J. M. Poate, K. N. Tu, Jean-Claude Mayor et al. · Journal of The Electrochemical Society · 1979 · 1.7K citations
Natural Sciences, Materials Engineering, Materials Science +12