Publication | Closed Access
Low temperature reactions at Si/metal interfaces; What is going on at the interfaces?
241
Citations
44
References
1983
Year
Materials ScienceEngineeringPhysicsSi/metal InterfacesSurface ScienceApplied PhysicsMetallurgical InteractionPhysical ChemistrySilicon On InsulatorMicroelectronicsInterface StructureLow Temperature ReactionsInterface PropertyInterface Phenomenon
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