How Learning Control Supports Industry 4.0 in Semiconductor Manufacturing

A survey of iterative learning control

Douglas A. Bristow, Marina Tharayil, Andrew G. Alleyne · IEEE Control Systems · 2006 · 2.9K citations

Engineering, Autonomous Systems, Machine Learning +12

Using basis functions in iterative learning control: analysis and design theory

Jeroen van de Wijdeven, О.H. Bosgra · International Journal of Control · 2010 · 117 citations

Natural Sciences, Data Science, Machine Learning +11

Frequency-Domain ILC Approach for Repeating and Varying Tasks: With Application to Semiconductor Bonding Equipment

Frank Boeren, Abhishek Bareja, Tom Kok et al. · IEEE/ASME Transactions on Mechatronics · 2016 · 99 citations · Full text

Engineering, Manufacturing Engineering, Systems Engineering +17