Physical Chemistry Chemical Physics · 2021 · 14 citations · 44 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistryPhysical ChemistryThin FilmsAtomic Layer DepositionThin-film DepositionThin-film MaterialsAtomic Layer Deposition PrecursorsPlasma DepositionPlasma-enhanced Atomic Layer DepositionPlasma-enhanced DepositionPrecursor Chemistry
Lithium fluoride films were prepared by atomic layer deposition (ALD) using a new route in which LiN(SiMe<sub>3</sub>)<sub>2</sub> is used as a precursor and SF<sub>6</sub> plasma as a coreactant. It was demonstrated that SF<sub>6</sub> plasma is a promising coreactant for ALD of high purity lithium fluoride films.
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2.5% efficient organic plastic solar cells
Sean E. Shaheen, Christoph J. Brabec, Niyazi Serdar Sariçiftçi et al. · Applied Physics Letters · 2001 · 2.6K citations · Full text
Natural Sciences, Materials Engineering, Materials Science +17
Interface Stability in Solid-State Batteries
William D. Richards, Lincoln J. Miara, Yan Wang et al. · Chemistry of Materials · 2015 · 1.6K citations · Full text