Design and realization of sculpture-shaped ciliary MEMS vector hydrophone

Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devices

Bharat Bhushan · Microelectronic Engineering · 2006 · 403 citations

Engineering, Biomedical Engineering, Materials Science +12

Hydrophone for Measuring Particle Velocity

C. B. Leslie, J. M. Kendall, J. L. Jones · The Journal of the Acoustical Society of America · 1956 · 179 citations

Engineering, Ocean Engineering, Physics +15

Design, fabrication, and preliminary characterization of a novel MEMS bionic vector hydrophone

Chenyang Xue, Wendong Zhang, Binzhen Zhang et al. · Microelectronics Journal · 2007 · 163 citations

Engineering, Bioengineering, Ocean Engineering +12

Simulation methods for micro-electro-mechanical structures (MEMS) with application to a microtweezer

Fan Shi, P. S. Ramesh, Subrata Mukherjee · Computers & Structures · 1995 · 70 citations · Full text

Engineering, Computational Engineering, Mechanical Engineering +15

Research of DOA Estimation Based on Single MEMS Vector Hydrophone

Wendong Zhang, Guo Jun Zhang, Chen Xue et al. · Sensors · 2009 · 65 citations · Full text

Engineering, Marine Engineering, Ocean Engineering +12