Concepedia

Publication | Open Access

Strengthening ultrathin Si3N4 membranes by compressive surface stress

DOIFull Paper Access

16

Citations

13

References

2020

Year

A G Shafikov, Bart Schurink, Robbert Wilhelmus Elisabeth van de Kruijs, Jos Benschop, Wesley T. E. van den Beld, Z.S. Houweling, F. Bijkerk
Sensors and Actuators A Physical

References

YearCitations

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