Nanovoid-driven highly crystalline aluminum nitride and its application in solar-blind UV photodetectors

Moonsang Lee, Hyungbin Son, Hae-Yong Lee, Joonhee Moon, Heejin Kim, Ji-In Park, Zheng Liu, Myung Gwan Hahm, Mino Yang, Un Jeong Kim

Journal of Materials Chemistry C · 2020 · 15 citations · 32 references

Concepts

Abstract

Surface treatment in AlN layer introduces nanovoids, which suppressed the propagation of threading dislocations to the surface, thus encouraging the growth of high crystalline AlN.

References

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