Publication | Closed Access
Hydroquinone oriented growth control to achieve high-quality copper coating at high rate for electronics interconnection
18
Citations
30
References
2020
Year
Materials EngineeringMaterials ScienceElectrical EngineeringElectronics InterconnectionEngineeringWafer Scale ProcessingCorrosionSurface ScienceApplied PhysicsGrowth ControlChemical DepositionMicroelectronicsSurface ProcessingHigh-quality Copper Coating
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