Towards a better understanding of the CMUTs potential for SHM applications

An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations

Zhili Hao, A. Erbil, Farrokh Ayazi · Sensors and Actuators A Physical · 2003 · 376 citations

Engineering, Vibrations, Micromachines +15

Review of piezoelectric micromachined ultrasonic transducers and their applications

Joontaek Jung, Wonjun Lee, Woojin Kang et al. · Journal of Micromechanics and Microengineering · 2017 · 309 citations

Engineering, Mechanical Engineering, Piezoelectric Coefficient +18

Accurate Modeling of Quality Factor Behavior of Complex Silicon MEMS Resonators

Shirin Ghaffari, Eldwin J. Ng, Chae Hyuck Ahn et al. · Journal of Microelectromechanical Systems · 2014 · 89 citations · Full text

Engineering, Micromechanics, Mechanical Engineering +19

Structural Health Monitoring Using Textile Reinforcement Structures with Integrated Optical Fiber Sensors

Kort Bremer, F. Weigand, Yulong Zheng et al. · Sensors · 2017 · 85 citations · Full text

Characteristics of a commercially available silicon-on-insulator MEMS material

David C. Miller, Brad Boyce, Michael T. Dugger et al. · Sensors and Actuators A Physical · 2007 · 76 citations

Materials Science, Electrical Engineering, Engineering +6