Concepedia

Publication | Closed Access

A high-resolution area-change-based capacitive MEMS tilt sensor

DOI

47

Citations

20

References

2020

Year

K. S. Prakasa Rao, Huafeng Liu, Xiaoli Wei, Wenjie Wu, Chenyuan Hu, Ji Fan, Jinquan Liu, Liangcheng Tu
Sensors and Actuators A Physical

References

YearCitations

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